電槳清洗機 Plasma System

低壓電槳系統，能有效清除表面有機殘留物及
表面特性改良，具容易操作、單一寬域電槳構造，其作用如
清潔、增強親水特性及黏附性，使表面具防水性。

應用範圍：

PDMS bonding for Lab‐On‐A‐Chip research
Wrinkle nano channel
Cleaning organic contaminants
Hydrophilic / Hydrophobic treatment

P/R Ashing & Descum for LED fab.
Removal of polymers (with heating)
Etching PDMS, Parylene film
Surface modification of wafer batch

Etching polymers for nano channel
Etching oxides for silica nano tube
Etching dielectrics for micro electronics
Plasma De‐oxidation of metals
Removal of organic contaminants

Cell attachment on bio‐degradable film
Surface modification on plastics
Enhancing work function of ITO
Cleaning organic contaminants
Pre‐treatment before bonding films